Inspection of semiconductor defects, unevenness, and stains is handled by a single machine using the same inspection process.
In semiconductor manufacturing processes such as film deposition, resist coating, lithography, etching, and CMP, it is desirable to perform uniform manufacturing processes on each die on the wafer. However, in reality, variations such as foreign matter contamination, pattern defects, and film thickness lead to inconsistencies on the wafer.
By incorporating automated inspection equipment into each of these processes, fine adjustments to the semiconductor process operations can be made. Furthermore, not only for semiconductor wafers but also for metal etching products, defects and distortions are inspected visually. However, as the quantity of these processed products increases, the likelihood of oversight in visual inspections and the labor costs can become significantly inflated.
To reduce these oversights and labor costs, we introduce Prestige into the inspection processes of semiconductor and metal etching products, enabling cost reductions from oversight in the inspection process.
【Features】
● High-resolution specification of 7μm and high-throughput specification of 38μm pixel resolution, accommodating a wide range of inspections
● RGB three-color LED lighting for optimized illumination according to patterns
● Adjustable camera angles for inspecting bright field to dark field images
● Simultaneous processing of defect inspection and uniformity inspection
● Compatible with 6/8/12-inch wafers
● Optional features for backside wafer inspection
